Turbomolecular vacuum pumps
Clean vacuum for high vacuum applications

Phenix


Clean vacuum for high vacuum applications

  • completely dry compression
  • maintenance-free
  • magnetic levitation bearing
  • range of product variants

50 - 3300 L/s

10-8 Pa




http://www.busch.co.jp/en/products/productportfolio0/turbomolecular-pumps/info/